AG Associates is one of the most famous RTP equipment manufacturers. Many Integrated Chip companies, R&D centers, Institutes all over the world have been using AG Heatpulse Systems.
AG-RTP can provide professionally the following refurbished AG Heatpulse Rapid Thermal Processor with her 20 years experience.
AG-RTP can calso provide New AccuThermo AW 610 AccuThermo AW 810 with +/- 1 C of Steady-State Temperature Stability.
We are the exclusive licenced manufacture for AG Heatpulse 610. We are manufacturing the new AccuThermo AW-610,AccuThermo AW 810,originally the AG Heatpulse 610.The AccuThermo AW-610,AccuThermo AW 810 have innovative software and more advanced temperature control technologies.
Rapid Thermal processing
Rapid thermal processing (or RTP) refers to a semiconductor
manufacturing process which heats silicon wafers to high temperatures
(up to 1200 C or greater) on a timescale of several seconds or less. The
wafers must be brought down (temperature) slow enough however, so they
do not break due to thermal shock..Such rapid heating rates are attained
by high intensity lamps process. These processes are used for a wide variety
of applications in semiconductor manufacturing including dopant activation,
thermal oxidation, metal reflow and chemical vapor deposition.
Rapid thermal anneal (RTA) is a process used in semiconductor device fabrication which consists of heating a single wafer at a time in order to affect its electrical properties. Unique heat treatments are designed for different effects. Wafers can be heated in order to activate dopants, change film-to-film or film-to-wafer substrate interfaces, densify deposited films, change states of grown films, repair damage from ion implantation, move dopants or drive dopants from one film into another or from a film into the wafer substrate. Rapid thermal anneals are performed by equipment that heats a single wafer at a time using lamp based heating that a wafer is brought near. Unlike furnace anneals they are short in duration, processing each wafer in several minutes. Rapid thermal anneal is a subset of processes called Rapid Thermal Process (RTP).
AG-RTP is DBA of Allwin21 Corp.
Heatpulse is a Registered Trademark of AG Associates.