AG Associates is one of the most famous RTP equipment manufacturers. Many Integrated Chip companies, R&D centers, Institutes all over the world have been using AG Heatpulse Systems.

AG-RTP can provide professionally the following refurbished AG Heatpulse Rapid Thermal Processor with her 20 years experience.

• AG Heatpulse 210
• AG Heatpulse 310
• AG Heatpulse 410
• AG Heatpulse 610
• AG Heatpulse 2100
• AG Heatpulse 4100
• AG Heatpulse 4100S
• AG Heatpulse 4108
• AG Heatpulse 8108

  AG Heatpulse Spare Parts

Manufacture:AG Associates

Heatpulse is a Registered Trademark of AG Associates.AG 21XX(AG 2101/ AG 2106 / AG2148) is a rapid thermal processor which uses high-intensity, visible radiation to heat single wafer for short periods at precisely controlled temperatures.

1.4-6" wafer,Automatical Operation with frog robot.
2.Closed-loop temperature control with pyrometer or thermocouple temperature sensing.
3.Precise time-temperature profiles tailored to suit specific process requirements.
4.High-intensity visible radiation heats wafers for short periods. Fast heating and cooling rates unobtainable in conventional technologies.
5.Consistent wafer-to-wafer process cycle repeatability.
6.Elimination of external contamination.
7.Small footprint and energy efficiency.

AG 2101/ AG 2106 / AG 2148 RTA RTP is a versatile tool, which is useful for many applications:
1. Ion Implant Activation
2. Polysilicon Annealing
3. Oxide Reflow
4. Silicide Formation
5. Contact Alloying
6. Oxidation and Nitridation
7. GaAs Processing

We can also provide Allwin21 Corp proprietary AW Control Software and Superior Temperature Control Technology to upgrade the refurbished AG Heatpulse 2100 which provides significant advantages.