AG Associates is one of the most famous RTP equipment manufacturers. Many Integrated Chip companies, R&D centers, Institutes all over the world have been using AG Heatpulse Systems.
AG-RTP can provide professionally the following refurbished AG Heatpulse Rapid Thermal Processor with her 20 years experience.
AG 4100 Spare Parts List
If
you have spare parts for sale or can't find what you are looking for in
our database, please contact us at sales@ag-rtp.com
Control (Top)
7100-5667-01 PCA, Advanced Temperature Processor
7100-5222-05 PCA, Single Support
7100-5168-07 PCA, RMS Analog Board
7100-5123-03 PCA, 12-Bit AID, Modified
7100-5667-01 PCA, Advanced Temperature Processor
7100-5192-01 PCA, STD MIO-24, 24-Channel Relay Intfc
7100-5192-03 PCA, STD MIO-24, 24-Channel Relay Intfc
7100-5192-02 PCA, STD MIO-24, 24-Channel Relay Intfc
7100-3387-01 PCA, Floppy Disk Controller
7100-5190-01 PCA, SB8240 Dual Serial Interface
7100-5190-02 PCA, Dual Serial Interface
7100-5194-01 PCA, System Timing and Counting
7100-5193-01 PCA, D/A Board
7100-5193-02 PCA, D/A Board
7100-5188-xx PCA, 20-Bit Addressable Memory
7100-5133-04 PCA, CPU Board
7100-5190-03 Dual Serial Interface(for Wafer Aligner option)
7100-5124 Communications Board (SECS)(for E-SECS option)
7100-5125 PCA, SECS RS-232 Interface Adapter(for E-SECS option)
7100-5189-02 PCA, 3-Cassette Interface(for 3-Cassette option)
2100-0121 PCA, MIO-24 Relay Interface #4(for 3-Cassette Option)
7100-5146-02 Six-Gas Interlock Board,4100S
7100-5080-02 PCA. Oven Control Board
7100-1079-04 Control Select Module, Dual Control
7100-1079-03 Control Select Module, Single Control
Robot (Top)
7100-0580-04 End Effector Assembly,Plunger
7100-3552-01 Robot Support Assembly
7100-4166-01 Robot System,Equipe ATM-100
4100-0039-04 Robot, EquipeATM-100
7100-1535-03 End Effector Assembly, Slip-Free
7100-4127-01 End Effector Assembly, 5-6 Inch,Polysilicon Autoloader
7100-0577-05 Cooling Station Assembly
7100-0813-01 Motion Control Assembly
4100-0068-01 Controller Assembly, Equipe ATM- 100
7300-0807-05 Mounting Bracket, Robot Controller
7100-0700-05 Cable, Communications, Robot
6001-1030-03 Cable, Power, Controller-to-Robot
7100-0695-02 Cable, Power, Robot Controller
6001-1029-03 Cable, Signal, Controller-to-Robot
7100-1501-02 Cassette Assembly, Stationary, Receive
7100-1486-04 Cassette Assembly, Swivel, Receive
7100-1487-03 Cassette Assembly, Stationary, Send
7100-1485-04 Cassette Assembly, Swivel, Send
7100-2904-02 Swivel Mechanism Assembly
7100-1057-02 Susceptor Station Assembly,3-and 4-Inch
7450-0039-01 GaAs Susceptor,Autoloader,3"
7450-0039-02 GaAs Susceptor,Autoloader,4"
7450-0040-01 Cover,GaAs Susceptor,Autoloader,3"&4"
7400-0104-02 Tray,GaAs Susceptor,3"and 4"
7100-4194-01 Susceptor Station Assembly,4-Inch
7100-4191-01 Susceptor Station Assembly,6-Inch
4900-0006-01 Non-Contact Wafer Aligner Replacement Parts
Electric (Top)
7100-0726-01 Light Assembly
7100-4053-01 Chiller Transformer Assembly,4100S
7100-0058-02 Vacuum Pump Assembly
7100-3764-03 Chiller Assembly,Non-CFC,60Hz
7100-3764-02 Chiller Assembly,Non-CFC,50Hz
7100-3466-01 Assembly,Vacuum Display Panel Meter
7100-3453-01 Indicator Light Assembly
7100-3580-01 Exhaust Panel Assembly,Warm Gray
7100-3435-01 Filter and Blower Assembly
7100-0585-02 Power Filter Assembly,200/208VAC
7100-0589-02 Power Filter Assembly,380/415VAC
7100-2263-04 Assembly,Rear,EMO,Warm Gray
2451-0010-02 Lamp, 1200 Watts, 208 Volts
2109-0050 Lampholder, Tungsten-Halogen, 10A, 600V
7100-0039-03 Triac Assembly,4100S,200/208VAC
7100-0039-04 Triac Assembly,4100S,380/415VAC
7100-0565-12 Relay Panel Assembly
7100-0563-07 AC Power Module,200/208 VAC,5-Wire
7100-0563-08 AC Power Module,380/415 VAC,5-Wire
7100-1733-03 AC Power Module,200 VAC,4-Wire
7100-3441-01 Double O-Ring Chassis Assembly
7100-1323-01 Power Supply Assembly
7100-1344-01 Power Supply to Frame Assembly
7100-1339-01 Power Supply and Harness Assembly
7100-1270-01 Vacuum Pump Assembly,115V,50/60Hz
7100-1602-01 Vacuum Pump Assembly,220V,50/60Hz
Valve (Top)
4502-9066-01 Valve, Check, Pneumatic, 114NPT,
1 PSI
4502-9061-01 Valve, Needle, Manual, N.C., 2-Way, M, 1/2
4502-0176-01 Valve, Needle, 90D, .5T x.5T
4502-0059-01 Valve, Relief, Adjustable, 1/4 Swagelock
4502-9063-01 Valve, Diaphragm, Solenoid, N.C., 2W, F, 1/2
4502-9065-01 Valve, Check, 2-Way, Male, 1/4NPT, 1 PSI
4502-0301-01 Speed Controller
5103-9036-01 Switch, Pressure, 1/8 NPT, Adjustable
4502-0062-01 Pressure Reg., Manifold Mount, 1-100 PSI
4502-9060-01 Valve, Ball, Manual, N.C., 3-Way, M, 1/2
7310-0888-01 Handle, 3-Way Valve
7310-0889-01 Extension, 3-Way Valve
7310-0899-02 Bracket, 3-Way Valve
4502-0041-01 Valve, Solenoid, Normally-Closed, 4-Way
4502-9041-01 Valve, Manual, 1/4 Turn, Diaphragm
4502-9027-01 Valve, Dual-Diaphragm,3-Way,V-Block,Pneumatic
4502-9043-01 Valve, Diaphragm, Normally-Closed
4502-9042-01 Valve, Diaphragm, Normally-Open
2200-0053-01 Pressure Regulator Male-VCR
2706-0011-02 Filter, In-line, Gas, .01 Micron
4502-0173-01 Check Valve. Male. VCR. 2 PSI
Instrument (Top)
2908-0060-01 Meter, Water Flow w/ Switch,
3-6 GPM
2900-0035-01 Gauge, Pressure, 0-100 PSI, 1/8 NPT
2900-0035-02 Gauge, Pressure, 0-60 PSI, 1/8 NPT
2900-0035-03 Gauge, Pressure, 0-160 PSI, 1/8NPT
7100-1626-08 6-Line Gas Panel? Assembly,Clean
7100-3528-03 6-Line Gas Panel? Assembly,Clean
2900-0039-01 Pressure Gauge ,Mech.w/Fixed Male VCR
7100-1729-04 4-Line Gas Panel? Assembly,Clean
7100-3531-03 4-Line Gas Panel? Sub-Assembly
7100-1727-08 3-Line w/Purge Gas Panel? Assembly,Clean
7100-3530-06 3-Line w/Purge Gas Panel? Sub-Assembly
7100-1727-06 3-Line Gas Panel? Assembly,Clean
7100-3530-05 3-Line Gas Panel? Sub-Assembly
7100-1725-08 2-Line w/Purge Gas Panel? Assembly,Clean
7100-3529-06 2-Line w/Purge Gas Panel? Sub-Assembly
7100-1725-06 2-Line Gas Panel? Assembly,Clean
7100-1725-05 2-Line Gas Panel? Sub-Assembly
5300-0091-01 Thermostat, 150¨H, Open
7100-4227-03 Extended Range Pyrometer,Hi Gain
6017-0003-02 Thermocouple Type K, ETC
7100-5623-02 Dual Color Pyrometer Gauge Assembly
7100-1134-07 Dual Color Pyrometer,Optical Assembly,6"
O-ring (Top)
2504-0019-01 O-Ring, Kalrez, 2391D x .070W,
80 Duro
7310-2859-02 Flange, Double O-Ring, 4100S
2504-0070 O-Ring, Kalrez, .362 OD x .103 ID, 8D Duro
2504-0210 O-Ring, .3011D x.070W, 70 Duro
2504-0090 O-Ring, Silicone, White, 4.987ID x.103W
2504-0160 O-Ring, Silicone,compatible with N2, 02, Ar, Forming Gas and
NH3. Not compatible with HCl
2504-0144-01 O-Ring, Viton,compatible with N2, 02, Ar, Forming Gas and
HCI. Not compatible with NH3
2504-0146-01 O-Ring, Kalrez,compatible with all gases: N2, 02, Ar, Farming
Gas, NH3 and HCI
2504-0004-01 O-Ring,Silicone,.042ID¡Á..050W,70Duro
2504-0005-01 O-Ring,Silicone,3.237ID¡Á.103W,70Duro
2504-0145-01 O-Ring, Silicone, White, 5.4871D x .103D
Quartz& Ceramic (Top)
7400-0060-01 Quartz Wafer Tray, 4",
Standard
7400-0060-02 Quartz Wafer Tray, 5", Standard
7400-0111-01 Quartz Wafer Tray, 6", Standard
7400-0085-07 Quartz Wafer Tray, 4", Slip-Free
7400-0085-08 Quartz Wafer Tray, 5", Slip-Free
7400-0085-09 Quartz Wafer Tray, 6", Slip-Free
7310-2842-01 Isolation Tube, Quartz Insert, DU
7400-0132-01 Quartz Inlay, Floating Door
7400-0061-01 Wafer Pin, Cooling Station
7310-0831-02 Pin,Quartz
7310-0831-01 Pin,Quartz
Sensors and MFC (Top)
5300-0091-01 Thermostat,
150¨H, Open
7100-4227-03 Extended Range Pyrometer,Hi Gain
7100-5623-02 Dual Color Pyrometer Gauge Assembly
7100-1134-07 Dual Color Pyrometer,Optical Assembly,6"
7100-3532-02 Assembly, Photoelectric Sensor/Reflector
2908-0060-01 Meter, Water Flow w/ Switch, 3-6 GPM
2900-0035-01 Gauge, Pressure, 0-100 PSI, 1/8 NPT
2900-0035-02 Gauge, Pressure, 0-60 PSI, 1/8 NPT
2900-0035-03 Gauge, Pressure, 0-160 PSI, 1/8NPT
7310-2935-01 Holder, Sensor
2700-0004-01 Sensor, Optical Switch
3700-0021-01 Sensor, Lead Selenide
6017-0003-02 Thermocouple Type K, ETC
2201-0007-01 MFC, N2, Normally-Open, 0-10 SLM
2201-0011-01 MFC, O2, Normally-Closed, 0-10 SLM
2201-0012-01 MFC, HCl, Normally-Closed, 0-200 SCCM
2201-0013-01 MFC, Ar, Normally-Closed, 0-10 SLM
2201-0014-01 MFC, NH3, Normally-Closed, 0-5 SLM