AG Associates is one of the most famous RTP equipment manufacturers. Many Integrated Chip companies, R&D centers, Institutes all over the world have been using AG Heatpulse Systems.
AG-RTP can provide professionally the following refurbished AG Heatpulse Rapid Thermal Processor with her 20 years experience.
Refurbished AG Heatpulse 4100
Manufacture:AG Associates
Heatpulse is a Registered Trademark of AG Associates.AG Heatpulse 4100 Series are single-wafer, cassette-to-cassette rapid thermal processors, capable of processing in inert or corrosive ambient. The unit is built for the production environment. AG4100 is a rapid thermal processor which uses high-intensity, visible radiation to heat single wafer for short periods at precisely controlled temperatures.
1.High-intensity visible radiation heats wafers for short
periods. Fast heating and cooling rates unobtainable in conventional technologies.
2.Consistent wafer-to-wafer process cycle repeatability.
3.Elimination of external contamination.
4.Small footprint and energy efficiency.
5.Wafer Size 4ˇ±, 5ˇ± and 6ˇ± .
6.Robot control ability. (Equip Tech. robot with one arm)
7.Single Wafer Process.
8.Gold coated aluminum chamber with water cooling
9.Radiation heating lamp module
10.4-gas channel with 4 MFCs
11.Cassette to cassette wafer handling
12.Multiple cycle processing capability
13.Steady Temp Range: 600ˇăC to 1250ˇăC for pyrometer sensor, 100ˇăC to 600ˇăC
for Thermocouple.
14.Steady state process time 0 to 30000 sec programmable.
15.Temp Ramp-up Speed: 10ˇăC to 120ˇăC for wafer. Programmable
16.Ramp down speed 10ˇăC - 150ˇăC for wafer
17.Robot wafer cycling: 80 Wafers/Hr.
AG 4100 RTA RTP is a versatile tool, which is useful for many
applications:
1. Ion Implant Activation
2. Polysilicon Annealing
3. Oxide Reflow
4. Silicide Formation
5. Contact Alloying
6. Oxidation and Nitridation
7. GaAs Processing
We can also provide Allwin21 Corp proprietary AW Control Software and Superior Temperature Control Technology to upgrade the refurbished AG Heatpulse 4100 which provides significant advantages.