AG Associates is one of the most famous RTP equipment manufacturers. Many Integrated Chip companies, R&D centers, Institutes all over the world have been using AG Heatpulse Systems.

AG-RTP can provide professionally the following refurbished AG Heatpulse Rapid Thermal Processor with her 20 years experience.

• AG Heatpulse 210
• AG Heatpulse 310
• AG Heatpulse 410
• AG Heatpulse 610
• AG Heatpulse 2100
• AG Heatpulse 4100
• AG Heatpulse 4100S
• AG Heatpulse 4108
• AG Heatpulse 8108

  AG Heatpulse Spare Parts

Manufacturer:AG Associates

AG Heatpulse 610 is a rapid thermal processor which uses high-intensity, visible radiation to heat single wafer for short periods at precisely controlled temperatures. These capabilities, combined with the heating chamber's cold-wall design, superior heating uniformity, provide significant advantages over conventional furnace processing and conventional RTP systems.

1.4-6" wafer,Manual Operation
2.Closed-loop temperature control with pyrometer or thermocouple temperature sensing.
3.Precise time-temperature profiles tailored to suit specific process requirements.
4.High-intensity visible radiation heats wafers for short periods. Fast heating and cooling rates unobtainable in conventional technologies.
5.Consistent wafer-to-wafer process cycle repeatability.
6.Elimination of external contamination.
7.Small footprint and energy efficiency.

AG610 RTA RTP is a versatile tool, which is useful for many applications:
1. Ion Implant Activation
2. Polysilicon Annealing
3. Oxide Reflow
4. Silicide Formation
5. Contact Alloying
6. Oxidation and Nitridation

We also provide Allwin21 Corp proprietary AW Control Software and Superior Temperature Control Technology to upgrade the refurbished AG Heatpulse 610 which provides significant advantages.

1.Add timer watch for the oven safety issue (the original has no safety interlock for the computer locks up, chamber would be burned if the computer locks up when process running).
2.The new software with power summary function to detect either lamp failure or sensor failure
3.Software calibration and easy to be done.
4.More functions and I/O hardware “exposed” for easier maintenance and trouble shooting.
5.It is easy to edit recipe with GUI and graph display.
6.Save all process data on the computer hard disk.
7.A/D and D/A precision is 14 to 16 bits.
8.Detect in process and with color curve displayed on the screen.
9.Lamp damage detect in process.
10.Software watch dog to eliminate machine damage duo to the computer locks up or freeze.
11.Sensor status detect function.
12.On line help function