AG Associates is one of the most famous RTP equipment manufacturers. Many Integrated Chip companies, R&D centers, Institutes all over the world have been using AG Heatpulse Systems.
AG-RTP can provide professionally the following refurbished AG Heatpulse Rapid Thermal Processor with her 20 years experience.
AG 8108 Spare Parts List
If
you have spare parts for sale or can't find what you are looking for in
our database, please contact us at sales@ag-rtp.com
Control (Top)
7100-4165-01 Assembly, Teach Switch,
Robot
7100-5831-01 PC Companion, SUE, Modified
7100-6229-01 Front Bezel Assembly, Double O-Ring
7100-1886-04 Front Bezel Assembly, U.S. & Japan
7100-5765-01 Front Bezel Assembly, European
8330-5399-01 The schematic for this Front Bezel??
7500-0768-01 Guard. EMO Switch
7500-0855-02 Guard. EMO Switch
7100-6270-01 PCA, Swivel Control Board
7100-5425-03 Six-Gas Interlock Board, PCA
7100-3399-01 Oven Control Assembly, OCB/ZCB
7100-5633-02 PCA, 3-Phase Zero Crossing Detector, 60 Hz
7100-5633-02 PCA, 3-Phase Zero Crossing Detector, 50 Hz
7100-5179-02 PCA, Oven Control, 4108
7100-3061-01 Harness, Triac/OCB1
7100-3062-01 Harness, Triac/OCB2
7100-5219-02 PCA, Relay Panel Assembly
7100-5425-02 Six-Gas Interlock Board, PCA
7100-3399-01 Oven Control Assembly, OCB/ZCB
7100-5633-02 PCA, 3-Phase Zero Crossing Detector, 60 Hz
7100-5633-02 PCA, 3-Phase Zero Crossing Detector, 50 Hz
7100-5174-02 PCA, Oven Control, 4108
7100-4049-01 Computer Assembly, STD BUS, ERR
7100-4049-01 Computer Assembly, STD BUS, DCR
7100-7816-01 Assembly, Pentium Computer with Tape
7100-2454-07 Assembly, Left GUI Panel, Warm Gray
7100-2010-10 Assembly, Right GUI Panel, Warm Gray??????
Robot (Top)
7100-4166-02 Robot Assembly, Equlpe
ATM-100/ESC 200
7100-0577-05 Cooling Station Assembly
7100-2745-02 End Effector Assy, 8 Inch, Push Rod
7100-2744-01 End Effector Assy, 5, 6 & 8 In, Slip-Free
7500-0731-01 Chuck, Vespel
7300-0212-01 Plate, Vacuum Channel
1600-0001-01 Gasket/Sealant, 2.8Fl. Oz
7100-4060-01 End Effector Assembly, Thin
7100-4061-01 End Effector Assembly, with Plunger, Thin
0641-0512-01 Cassette Plate Kit, 5-6 Inch
7100-1187-05 Assembly, Cassette, Send, Stationary, 8 Inch
0641-0513-01 Cassette Plate Kit, 8 Inch
7100-1188-04 Assembly, Cassette, Receive, Stationary, 5-8 Inch
7100-1188-04 Assembly, Cassette, Receive, Stationary, 8 Inch
7100-2007-04 Cassette Assembly, Swivel, Send, 5-6 Inch
0641-0512-01 Cassette Plate Kit, 5-6 Inch
7100-2008-04 Cassette Assembly, Swivel, Receive, 8 Inch
7100-4083-02 Oven Module Assembly, Standard
7100-3124-01 Rear Flange Assembly, Double Containmen
7100-3163-01 T.C. Feedthrough Assy, Double Containment
7100-4283-01 Oven Module Assembly, Double O-Ring
7100-3124-01 Rear Flange Assembly, Double Containment
7100-4285-01 T.C. Feedthrough Assy., Double O-Ring/Containment
7100-5657-03 Oven Module Assembly, 8108, ez-DTC
7100-5631-03 Rear Flange Assembly, Double Containment
7100-3565-01 T.C. Feedthrough Assy., Double, Containment
7100-5796-02 Oven Module Assembly, Double O-Ring, DTC
7100-5631-03 Rear Flange Assembly, Double Containment
7100-4314-01 T.C. Feedthrough Assy., Double, Containment
7100-4078-03 Oven Assembly, 8108 Standard
7100-1976-03 Oven Door Mechanism Assembly
7100-5905-01 Oven Door Mechanism Assy, Double O-Ring
Electric (Top)
7100-3453-01 Light Assembly
7100-3764-05 Chiller Assembly, Non-CFC, 115 VAC, 60 Hz
7100-3764-06 Chiller Assembly, Non-CFC, 220 VAC, 50 Hz
7100-1270-05 Vacuum Pump Assembly, 115V, 50/60Hz
7100-3988-01 Assembly, 4 Plex, 115V, 15A, U.S. Only
7100-3993-01 Assembly, Water Leak Detector, 200V, Japan
7100-4280-01 Assembly, Double 0-Ring Chassis, 81 08
7100-5430-01 Assembly, Double 0-Ring
7100-3993-01 Assembly, Water Leak Detector, 200V, Japan
7100-2280-16 Assembly, Utility Panel, Warm Gray
7100-2407-01 Assembly, Solenoid Valves
7100-2406-04 Assembly, Pressure Regulator, 8108
7100-2405-01 Assembly, Extension, 3-Way Valve
7100-4304-01 Battery Back-up Option
7100-4278-02 Battery Back-up Assembly
7100-3060-03 Triac Plate Assembly, 200/208VAC 8108, UL
7100-3060-04 Triac Plate Assembly, 380/415 VAC,8108, UL
7100-2533-02 Power Filter Assembly, 208 VAC
7100-5974-01 DC Power Supply Assembly, 208 V
7100-5974-02 DC Power Supply Assembly, 115V
7100-3664-01 DC Power Supply Assembly, 208 VAC
7100-3664-02 DC Power Supply Assembly, 120VAC
7100-1626-11 Gas Panel Assembly, Clean, 6-Line
7100-3528-03 Gas Panel Sub-Assembly, Clean, 6-Line
7100-1729-06 Gas Panel Assembly, Clean, 4-Line
7100-3531-03 Gas Panel Sub-Assembly, 4-Line
7100-1727-14 Gas Panel Assembly, Clean, 3-Line wlPurge
7100-3530-06 Gas Panel Sub-Assembly, 3-Line wlPurge
7100-1727-12 Gas Panel Assembly, Clean, 3-Line
7100-3530-05 Gas Panel Sub-Assembly, 3-Line
7100-3731-02 Gas Panel Assembly, Clean 3-Line w/purge,Fujikin/STEC
7100-3640-02 Gas Panel Sub-Assembly, 3-Line w/purge,Fujikin/STEC
7100-1725-13 Gas Panel Assembly, Clean, 2-Line w/Purge
7100-3529-06 Gas Panel Sub-Assembly, 2-Line w/Purge
7100-1725-11 Gas Panel Assembly, Clean, 2-Line
7100-3529-05 Gas Panel Sub-Assembly, 2-Line
7100-3730-02 Gas Panel Assembly, Clean 2-Line w/purge,Fujikin/STEC
7100-3641-02 Gas Panel Sub-Assembly, 2-Line w/purge,Fujikin/STEC
7100-3706-03 Gas Panel Assembly with External Purge,6-Line
7100-3698-02 Gas Panel Sub-Assembly with External Purge, 6-Line
Valve (Top)
5108-0017-01 Switch, Pressure, Pneumatic
Valve
7100-2407-01 Solenoid Valve Assembl
4502-9066-01 Valve, Check, Pneumatic, 1/4NPT, 1 PSI
2522-0914-11 Adater, 1/4T x 1/4NPT, SST
4502-9061-02 Valve Needle Manual N.C. 2-Way M 1/2
4502-0176-01 Valve, Flow Controller, Manual, M-F, 1/2
7100-2405-01 Assembly, Extension, 3-Way Valve
2522-0914-24 Adater 1/2T x 1/2NP SST
4502-0059-01 Valve, Relief, Adjustable, 1/4 Swaelock
4502-9063-01 Valve, Diaphragm, Solenoid, N.C., 2W, F, 1/2
4502-9065-01 Valve, Check, 1/4 NPT, 1PSI
5103-9036-01 Switch, Pressure, 1/8 NPT, Adjustable
4502-0062-01 Pressure Regulator, Manifold Mount, 1-100
4502-9060-01 Valve, Ball, Manual, N.C., 3-Way, M, 112
7310-0888-01 Handle, 3-Way Valve
7310-0889-01 Extension, 3-Way Valve
7310-0899-02 Bracket, 3-Way Valve
4502-0041-01 Valve, Solenoid, Normally-Closed, 4-Way
4502-9041-01 Valve, Manual, 1/4 Turn, Diaphragm
4502-9027-01 Valve, Dual-Diaphragm, 3-Way, V-Block,Pneumatic
4502-9043-01 Valve, Diaphragm, Normally-Closed
4502-9042-01 Valve, Diaphragm, Normally-Open
7100-1652-01 Manifold Assembly, 6-Gas
4502-0173-01 Check Value, Male, VCR, 2 PSI
4502-0019-01 Solenoid, N.C., 3-Way
2522-0900 Manifold. DC Solenoid Valve
Instrument (Top)
7100-2406-04 Assembly, Pressure
Regulator, 8103
2908-0060-01 Meter. Water Flow w1 Switch. 3-6 GPM
2908-0080-01 Meter, Nitrogen Flow Switch, 4-30 CFM
2900-0035-01 Gauge, Pressure, 0-100 PSI, 1/8 NPT, 1.5 In.
2900-0035-02 0-60 PSI, 1/8 NPT
7310-0899-02 Bracket, 3-Way Valve
4502-0041-01 Valve, Solenoid, Normally-Closed, 4-Way
2200-0053-01 Pressure Regulator, Male-VCR
2900-0039-01 Pressure Gauge, Mech. w/Fixed Male VCR
7100-1626-11 Gas Panel Assembly, Clean, 6-Line
7100-3528-03 Gas Panel Sub-Assembly, Clean, 6-Line
7100-1729-06 Gas Panel Assembly, Clean, 4-Line
7100-3531-03 Gas Panel Sub-Assembly, 4-Line
7100-1727-14 Gas Panel Assembly, Clean, 3-Line wlPurge
7100-3530-06 Gas Panel Sub-Assembly, 3-Line wlPurge
7100-1727-12 Gas Panel Assembly, Clean, 3-Line
7100-3530-05 Gas Panel Sub-Assembly, 3-Line
7100-3731-02 Gas Panel Assembly, Clean 3-Line w/purge,Fujikin/STEC
7100-3640-02 Gas Panel Sub-Assembly, 3-Line w/purge,Fujikin/STEC
7100-1725-13 Gas Panel Assembly, Clean, 2-Line w/Purge
7100-3529-06 Gas Panel Sub-Assembly, 2-Line w/Purge
7100-1725-11 Gas Panel Assembly, Clean, 2-Line
7100-3529-05 Gas Panel Sub-Assembly, 2-Line
7100-3730-02 Gas Panel Assembly, Clean 2-Line w/purge,Fujikin/STEC
7100-3641-02 Gas Panel Sub-Assembly, 2-Line w/purge,Fujikin/STEC
7100-3706-03 Gas Panel Assembly with External Purge,6-Line
7100-3698-02 Gas Panel Sub-Assembly with External Purge, 6-Line
O-ring (Top)
7100-5430-01 Assembly, Double O-Ring
Components
7310-2090-01 O-Ring, Viton,.875ID x .070W
2504-0015-02 O-Ring, 7 x 71/4 x 118, SiVicone, White
2504-2476-01 O-Ring, Kalrez,.1O1 lD x.070W
2504-0105-01 O-Ring, Silicone, 7.0 L x.093W
2504-0106-01 O-Ring, Silicone, 7.5 x.093W
2504-0145-04 O-Ring, Silicone, 2-018
2505-0145-03 O-Ring, Silicone, 2-262,60D
2504-2476-01 O-Rin, Kalrez,.101 I D x.070W
2504-0145-03 0-Ring, silicone, 2-013
2504-2475-01 O-Ring, 7 x 71/4 x 1/8,Viton. White
2504-0146-01 O-Ring, 7 x 71/4 x 1/8,Kalrez
2504-0015-02 0-Ring, 2-262, 60D, White silicone
Quartz& Ceramic
(Top)
7400-0061-01 Water Pin, Cooling Station
2510-0001-58 Dowel Pin-1250D x.375L, SST
7200-0613-02 Rear Locating Pin, Tray
7200-0615-03 Front Locating Pin, Tray
7200-0616-02 Support Pin, Tray
7310-2885-01 Baffle, Quartz
7310-6066-01 Pin Tray Locating, Rear
7400-0100-06 Isolation Tube, 8-Inch Oven
0641-0573-03 Kit, Quartz Liner, 8-Inch Oven
7319-2841-02 Isolation Tube, Quartz Liner, 8-Inch Over
7310-3009-01 Quartz Liner, 8-Inch Oven
7100-5730-01 Tray Assembly, 6-Inch,Removable Pins, ez-DTC
7310-4769-01 Tray, 6-Inch,Removable Pins
7310-4764-01 Pin, Quartz Tray
7100-5743-02 Assembly, Slip-Free Ring Package, 6", SEMI
7100-5742-02 Assembly, Slip-Free Ring Package, 6", JEIDA
7100-5762-02 Assembly, Slip-Free Ring Package, 6", Notch
7310-4367-01 TC Wafer,6-inch,P-, Type K, Model 1530
7310-4367-02 TC Wafer,6-inch,P+, Type K, Model 1530
7100-5996-02 ?Tray Assembly, 6-Inch,Ceramic Shield/ez-DTC
7310-5198-02 Tray, 6-Inch, Ceramic Shield
7310-5193-01 Pin, Tray, Ceramic Shield
7100-6003-01 Assembly, Slip-Free Ring Package, 6", SEMI, CS
7100-6004-01 Assembly, Slip-Free Ring Package, 6", JEIDA, CS
7100-6005-01 Assembly, Slip-Free Ring Package, 6", Notch, CS
7100-5727-01 Tray Assembly, 8-Inch,Removable Pins, ez-DTC
7310-4765-01 Tray Assembly, 8-Inch, Removable Pins
7310-4764-01 Pin, Quartz Tray
7100-5748-02 Assembly, Slip-Free Ring Package, 8", SEMI
7100-5754-02 Assembly, Slip-Free Ring Package, 8", JEIDA
7100-5751-01 Assembly, Slip-Free Ring Package, 8", Notch
7310-4368-01 TC Wafer, 8-Inch,P-,Type K,Model 1530
7310-4368-02 TC Wafer, 8-Inch,P+,Type K,Model 1530
7100-5994-02 Tray Assembly, 8-Inch,Coramie Shield\ezDTC
7310-5192-02 Tray, 8-Inch, Ceramic Shield
7310-5193-01 Pin, Tray, Ceramic Shield
7310-5186-01 Ceramic Shield. 8-Inch
7100-5997-01 Assembly, Slip-Free Ring Package, 8", SEMI, CS
7100-5998-01 Assembly, Slip-Free Ring Package, 8", JEIDA, CS
7100-5999-01 Assembly, Slip-Free Ring Package, 8", Notch, CS
7100-1844-01 Tray Assembly, 8-Inch,Removable Pins
7400-0133-03 Tray Assembly, 8-Inch, Removable Pins
7400-0134-01 Pin Quartz Tray
7100-5993-02 Tray Assembly, 8-Inch,Ceramic Shield
7100-5995-02 Tray Assembly, 6-Inch,Ceramic Shield
7310-5195-02 Tray Assembly, 6-lnch, Removable Pins
7310-5193-01 Pin, Tray, Ceramic Shield
7310-5194-01 Ceramic Shield. 6-Inch
7100-6000-01 Assembly, Slip-Free Ring Package, 6", SEMI
7100-6001-01 Assembly, Slip-Free Ring Package, 6", JEIDA
7100-6002-01 Assembly, Slip-Free Ring Package, 6", Notch
7400-0106-06 Tray Assembly, 6-Inch,Slip-Free
7400-0106-06 Tray, 6-Inch, Slip-Free
7100-5747-01 Assembly, Slip-Free Ring Package, 6", SEMI
7100-5753-01 Assembly, Slip-Free Ring Package, 6", JEIDA
7100-5750-01 Assembly, Slip-Free Ring Package, 6", Notch
7400-0109-06 Tray Assembly, 5-Inch, Slip-Free
7400-0109-06 Tray Assembly, 5-Inch, Slip-Free
7100-5746-01 Assembly, Slip-Free Ring Package, 5", SEMI
7100-5752-01 Assembly, Slip-Free Ring Package, 5", JEIDA
7100-5749-01 Assembly, Slip-Free Ring Package, 5", Notch
7310-4366-01 Wafer, 5-Inch,P-,Type K,Model 1530
7310-4366-02 Wafer, 5-Inch,P+,Type K,Model 1530
7200-0609-01 Socket Shim
7400-0102-01 Quartz Inlay, Door, 8 Inch
7310-3575-01 Quartz Inlay, Door, 8 Inch
7310-3576-01 Clip, Quartz Inlay
Sensors and MFC (Top)
7100-2779-01 Reed
Switch Assembly
7100-3532-02 Assembly, Photoelectric Sensor/Reflector
7310-2985-01 Holder, Sensor
7100-3753-02 Actuator Assembl, Receive Cassette
2201-0007-02 MFC, N2, Normally-Open, 0-10 SLM
2201-0011-02 MFC, 02, Normally-Closed, 0-10 SLM
2201-0012-02 MFC, HCI, Normally-Closed, 0-200 SlM
2201-0013-02 MFC, Ar, Normally-Closed, 0-10 SLM
2201-0014-02 MFC, NH3, Normally-Closed, 0-5 SLM
Others
(Top)
7100-4249-01
Front Access Assembly
7100-4248-01 Cable Cylinder w/Reed Switch Assembly
7100-2263-01 Rear EMO Assembly, Warm-Grey
7100-5915-01 Triac Filter Shelf, Europe
7100-5909-01 Assembly, Main Power Filter, Europe
2109-0050 Lampholder, Tungsten-Halogen, 10A, 600V
7100-5518-03 ez-DTC Adjustable Mechanism Assembly
7100-1182-09 Extended Range Pyrometer
7100-4018-02 ERP/SWP Insulation Box Assembly
7100-4075-06 Short Wave Pyrometer
7100-4018-02 ERP/SWP Insulation Box Assembly
7100-4069-04 DCP Optical Assembly, 8-Inch, Omen Stability
7100-4070-05 Dual-Color Pyrometer Gauge Assembly
7100-4018-01 DCP Insulation Box Assembly
7100-4071-04 Tube Pyrometer Assembly, DCP
7100-5915-01 Triac Filter Shelf, Europe
7100-5909-01 Assembly, Main Power Filter, Europe
7100-1842-04 Fan Bracket Assembly, Warm Gray
2706-0011-02 Filter, In-line, Gas, .01 Micron
7100-1982-03 Heat Exchanger Assembly, 115 V 60 Hz
7100-1983-03 Heat Exchanger Assembly, 220V,50 Hz
7100-1270-05 Vacuum Pump Assembly, 115V, 50/60 Hz
7100-1602-01 Vacuum Pump Assembly, 22 0V, 50/60 Hz
7100-3101-03 5usceptor Assembly, 8-Inch, Type R
7100-3181-03 susceptor Assembly, 8-Inch, Type R
7100-3101-02 Susceptor Assembly, 6-Inch, Type R
7100-3181-01 Susceptor Assembly, 5-Inch, Type R