AG Associates is one of the most famous RTP equipment manufacturers. Many Integrated Chip companies, R&D centers, Institutes all over the world have been using AG Heatpulse Systems.
AG-RTP can provide professionally the following refurbished AG Heatpulse Rapid Thermal Processor with her 20 years experience.
Refurbished AG Heatpulse 8108
Manufacture:AG Associates.
Heatpulse is a Registered Trademark of AG Associates.AG Heatpulse 8108 Series are single-wafer, cassette-to-cassette rapid thermal processors, capable of processing in inert or corrosive ambient. The unit is built for the production environment. AG8108 is a rapid thermal processor which uses high-intensity, visible radiation to heat single wafer for short periods at precisely controlled temperatures.
1. Wafer Size 4¡±, 5¡±, 6¡±, 8¡±
2.Robot control ability. (Equip Tech. robot with one arm)
3.Single Wafer Process.
4.Gold coated aluminum chamber with water cooling
5.Radiation heating lamp module
6.4-gas channel with 4 MFCs
7.Cassette to cassette wafer handling
8.Precise Temperature/Time control, Temperature measuring precision ¡À
1¡ãC.
9.Multiple cycle processing capability
10.High-intensity visible radiation heats wafers for short periods. Fast
heating and cooling rates unobtainable in conventional technologies.
11.Consistent wafer-to-wafer process cycle repeatability.
12.Elimination of external contamination.
13.Small footprint and energy efficiency
AG8108 RTA RTP is a versatile tool, which is useful for many applications:
1 Ion Implant Activation
2 Polysilicon Annealing
3 Oxide Reflow
4 Silicide Formation
5 Contact Alloying
6 Oxidation and Nitridation
7 GaAs Processing
We can also
provide Allwin21 Corp proprietary AW Control Software and Superior Temperature
Control Technology to upgrade the refurbished AG Heatpulse 8108 which
provides significant advantages.