Refurbished AG Heatpulse 610

Manufacturer:AG Associates

Refurbished by:Allwin21 Corp

AG Associates Heatpulse 610 is a rapid thermal processor which uses high-intensity, visible radiation to heat single wafer for short periods at precisely controlled temperatures. These capabilities, combined with the heating chamber's cold-wall design, superior heating uniformity, provide significant advantages over conventional furnace processing and conventional RTP systems.Wafer Size:Up to 6inch.

Manual Operation

Closed-loop temperature control with pyrometer or thermocouple temperature sensing.
Precise time-temperature profiles tailored to suit specific process requirements.
High-intensity visible radiation heats wafers for short periods. Fast heating and cooling rates unobtainable in conventional technologies.
Consistent wafer-to-wafer process cycle repeatability.
Elimination of external contamination.
Small footprint and energy efficiency.

AG 610 RTA RTP is a versatile tool, which is useful for many applications:

• Ion Implant Activation
• Polysilicon Annealing
• Oxide Reflow
• Silicide Formation
• Contact Alloying
• Oxidation and Nitridation

Typical Application Area:

• Chip Maufacture
• Compound Industry:GaAs, GaN, GaP, GaInP,InP and SiC
• Optronics:Planar optical waveguides,LASERs, LEDs and VCSELs
• Biomedical
• MEMS
• Nanotechnology
• Solar Cell

We can also provide our own proprietary AW Control Software and Superior Temperature Control Technology to upgrade the refurbished AG Heatpulse 210 which provides the following significant advantages.

1. Add timer watch for the oven safety issue (the original has no safety interlock for the computer locks up, chamber would be burned if the computer locks up when process running).
2. The new software with power summary function to detect either lamp failure or sensor failure
   Software calibration and easy to be done.
3. More functions and I/O hardware “exposed” for easier maintenance and trouble shooting.
4. It is easy to edit recipe with GUI and graph display.
5. Save all process data on the computer hard disk.
6. A/D and D/A precision is 14 to 16 bits.
7. Detect in process and with color curve displayed on the screen.
8. Lamp damage detect in process.
9. Software watch dog to eliminate machine damage duo to the computer locks up or freeze.
   Sensor status detect function.
10. On line help function