AG Associates is one of the most famous RTP equipment manufacturers. Many Integrated Chip companies, R&D centers, Institutes all over the world have been using AG Heatpulse Systems.

AG-RTP can provide professionally the following refurbished AG Heatpulse Rapid Thermal Processor with her 20 years experience.

• AG Heatpulse 210
• AG Heatpulse 310
• AG Heatpulse 410
• AG Heatpulse 610
• AG Heatpulse 2100
• AG Heatpulse 4100
• AG Heatpulse 4100S
• AG Heatpulse 4108
• AG Heatpulse 8108

  AG Heatpulse Spare Parts

The AW Control Software provides a unique upgrade for RTP, Stripper, Etching and other systems which have won a high reputation among our customers.

The AW software Integrates all of the Process Control into a single reliable software package. It allows the user to control the entire machine from one single interface. The user can create recipes, run processes with the recipes, view and analyze process parameters, calibrate the entire system, and run diagnostics routines.

Features:
* GUI interface
* Real-Time process data acquisition
* Real-Time graphics
* Process Data Analysis
* Process Data and Recipe storage on a hard drive.
* Recipe Editor for Multi-step Processing
* System Calibration and Diagnostics
* Closed-loop System Controls

It has a Graphics User Interface (GUI) instead of the old Text based user interface. It is intuitive and easy to use with mouse or touch screen (optional).

The AW software Acquires Process Data in real-time. It then plots it in real-time on a graphics X-Y plot. So, what you see is what is actually happening. The process data is stored on a hard disk in real-time. This data can latter be retrieved and analyzed.

The blue line is the actual temperature. The black line is the recipe curve. The red line is the power changing for the heating source.

The AW software contains a Recipe Editor for creating and editing of multi-step process recipes. Recipes are created to automate the process of semiconductor wafers by telling the process control how to control each available parameter. It also allows the fine-tuning of certain parameters for specific applications.

It has comprehensive System Calibration and Diagnostics routines to automate many tasks and to help troubleshoot the system.

By maintaining real-time independent Closed-loop System Controls, the system optimizes vital device parameters

The AW Software upgrade uses a Pentium class computer, eliminating the old 80386 CPU, 6800 MPU, or the Z-80 MPU.

Main Page

Precise Process Temperature Control Result:

Pyrometer Calibration

Chamber Calibration

"I/O,A/D,D/A" information expose

Excel recipe Edit

Diagnoses Page

Help on line

Down Load the Software Manual