AccuThermo AW 810 RTP

AccuThermo AW 810M is a desktop rapid thermal processor for 5 to 8 inch wafer , which uses high-intensity, visible radiation to heat single wafer for short periods at precisely controlled temperatures. These capabilities, combined with the heating chamber's cold-wall design, superior heating uniformity advanced temperature control technology and AW 900 new software, provide significant advantages over conventional furnace processing and conventional RTP systems.

AccuThermo AW 810M key features include:

Wafer Size:5 to 8 inch
Advanced ERP Pyrometer for precise high temperature measurement(See Detail ERP Pyrometer).
Add timer watch for the oven safety issue (the original has no safety interlock for the computer locks up, chamber would be burned if the computer locks up when process running).
The new software with power summary function to detect either lamp failure or sensor failure
Manual Operation
Use Sumpower as a parameter to control the uniformity of the wafer.
Closed-loop temperature control with pyrometer or thermocouple temperature sensing.
Precise time-temperature profiles tailored to suit specific process requirements.
High-intensity visible radiation heats wafers for short periods. Fast heating and cooling rates unobtainable in conventional technologies.
Consistent wafer-to-wafer process cycle repeatability.
Elimination of external contamination.
Small footprint and energy efficiency.
Software calibration and easy to be done.
More functions and I/O hardware “exposed” for easier maintenance and trouble shooting.
It is easy to edit recipe with GUI and graph display.
Save all process data on the computer hard disk.
A/D and D/A precision is 14 to 16 bits.
Detect in process and with color curve displayed on the screen.
Lamp damage detect in process.
Sensor status detect function.
On line help function

AccuThermo AW 810 RTA RTP is a versatile tool, which is useful for many applications:

Ion Implant Activation
Polysilicon Annealing
Oxide Reflow
Silicide Formation
Contact Alloying
Oxidation and Nitridation
GaAs Processing

Typical Application Area:

Chip Maufacture
Compound Industry:GaAs, GaN, GaP, GaInP,InP and SiC
Optronics:Planar optical waveguides,LASERs, LEDs and VCSELs
Biomedical
MEMS
Nanotechnology
Solar Cell