AutoEtch Lam 490

Manufacturer: LAM Research
Model: Lam 490
Serial: 1903
Condition:Used,Working,complete,just Disassembly from a Fab.

*Fully automated microprocessor control
*High throughput vacuum load locked
*Programmable, variable electrode spacing
*Endpoint detection
*Can be configured for 3" to 6" wafers
*Bulk head mount configuration
*ENI OEM 6 13.56 MHz
*650W RF Generator. 208 V, 3 Phase, 60 Hz