Refurbished Branson IPC 3000

Manufacturer:Branson

Refurbished by:Allwin21 Corp

The Branson IPC 3000 is a barrel plasma etcher that uses oxygen to etch organic films and residues such as photoresist in a process commonly referred to as "de-scumming." During a normal run for the Branson Barrel Etcher, the chamber is evacuated to under 0.5 torr pressure. A regulated flow of oxygen gas is introduced into the chamber and RF energy is applied to the chamber coils, which creates an oxygen plasma which does the etching. The oxygen ions in the plasma react with organics, such as photoresist, oxidizing or descumming the compounds off of the surface. The oxidized organics are pumped out of the Branson Barrel Etcher's chamber as exhaust gas.

Branson IPC 3000 Features:
POWER RATING : 1000 watts continuous input
REACTOR:1ea 10" dia. x 20" long
OPERATING PRESSURE RANGE:0.1 - 10 torr
VACUUM SEALS : Silicone O rings and bell jar gasket
REACTOR WINDOW: Hinged and spring loaded, with latch for open position
PRESSURE TRANSDUCER: Thermocouple type
IMPEDANCE CONTROL: Matches from 10-1000 watts to present input impedance of 50 ohms at RF power input connector. Automatic impedance matching once preset.

Branson IPC 3000 Applications:

• Photoresist Stripping

  High dose implant (As+, B+, P+)
  Post-polysilicon etch
  Post-metal etch
  Post-oxide etch
  Rework
  Controlled Resist Removal

• Post-develop descum (pre-etch)
  Dry/wet process capability
  Resist planarization
  Uniformity capability

We can also provide advanced AW Control Software and Superior Temperature Control Technology to upgrade the refurbished Branson IPC 3000 which provides the following significant advantages.

* Auto processing with RF, gas flow and timer set up
* 1 process gas with MFC
* Upgrade with new software and controller
* Touch screen
* 4 gases by MFC(Option,50 sccm up to 30000 sccm,control up to 6 valves include main vacuum valve and vent or purge valve..)
* Baratron to read the pressure(Option)
* Throttle valve to control the pressure to keep the process repeatable(Option)
* ENI RF generator either ACG series(Option) without water cooling or EOM-6, OEM-12b(Option) series with cooling water