Used Hitachi FE-SEM model S-4160

6 inch full wafer system for in-process inspection and metrology of photoresist, e-beam resist, and nanolithographic structures: Semi-clean contamination level, No Au or Nobel metals allowed. Field emission gun with resolution to ~35 angstoms typical. On-board CD measurement and metrology functions. EDX Noran Instruments X-Ray Microanalysis system is controlled by a high-performance workstation with easy-to-use window manager. Image analysis available in a similar windows-based interface. The system is used with electron microscopes and x-ray detectors for a variety of applications, including the study of Semiconductors, Geological and metallurgical samples, biological specimens. Hardware components include monitor, mouse and keyboard, chassis, active scan interface control box, central processing unit. The Voyager system can be connected to a variety of SEMs, TEMs, and STEMs. Software: Solaris UNIX operating system, Desktop tools, Tools for EDS, Imaging, & Automation .

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We provide high quality, used, 2nd hand, rebuilt and refurbished CD-SEM. FESEM, SEM, and FIB.(SEM Image Digitizer System.Schottky Field Emission Filaments for CD-SEM equipment).

SEM:

• Zeiss/Leo DSM982 FE SEM
• Hitachi S-4500 - FE SEM, Type I and Type II
• Hitachi S-4700 - FE SEM, Type II
• Hitachi S-4800 - FE SEM, Type II
• Zeiss/Leo 435VP - W SEM, variable pressure JSM-6401F
• JSM-6330F
• JSM6300
• JSM6400
• SEIKOI SMI 8100
• SEIKOI SMI 8300
• Hitachi S-806C

CD/SEM:

• Hitachi S-8820 for 5", 6" or 8", Silicon or GaAs wafers
• Hitachi S-8840 for 5", 6" or 8" , Silicon or GaAs wafers
• Hitachi S-9300 for 6", 8" or 12 " Silicon wafers

FIB:

• FEI/Micrion M9100 Workstation, Gas box optional
• FEI/Micrion M9500 Workstation, Gas box optional
• Seiko 8300 FIB
• Seiko 8100 FIB

Our equipment is fully reconditioned to meet or exceed OEM specifications and carried out by the qualified engineers with many years of experience working for OEM.

We provide:

-Complete turn key solutions including installation worldwide.
-Modifying and re-engineering equipment to meet specific customer applications.
-Operation, maintenance, and applications training.
-Warranty service for our equipment.