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Used Hitachi S-4700 SEM Cold Field Emission SEM System

A Cold Field Emission Gun Scanning Electron Microscope (FEGSEM) of "below-the-lens" design capable of (manufacturer's claims) 1.5 nm resolution at 15 kV, 12 mm W.D.; and 2.5 nm resolution at 1 k, 2.5 mm W.D. Magnification ranges from 30X to 500,000X. Specimen tilt at 12 mm W.D up to 45 degrees. Electron source is a cold FE gun producing high brightness (~ 2 X 109 A / cm2/sr) with little energy spread (0.2 - 0.3 eV). The "below-the-lens" design and large sample chamber port permits samples as large as 100 mm diameter X 17 mm thick H. Oil-free vacuum systems pump column and sample exchange. Available image modes include secondary and backscattered electron images. There are two secondary electron detectors; one above the objective lens, the other below. Digital images may be acquired in BMP, TIFF, or JPEG file formats at 640 X 480, 1280 X 960, or 1560 X 1920 pixels

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An Emitech cryo stage is available for use with samples prepared in the Emitech K-1250 Cryopreparation / Cryotransfer System shown below.

Equipment / Accessories
Hitachi S-4700 with a variety of non-cryo sample holders
CryoSEM observation using Emitech Cryo Stage, Model K-1250 Cryopreparation System, and a variety of sample holders
Backscatter imaging at TV rates and low voltage (threshold 2.5 kV on gold) with Autrata modified YAG (yttrium aluminum garnet, cerium doped) crystal
Keithly Specimen Current Detector

Applications
High-resolution topographic contrast (Se) and atomic number contrast (BSe) imaging of biological and non-biological samples in both room temperature and cryo modes
Applicable to imaging of immunogold labeled individual cells and bacteria

Specifications

Secondary electron image resolution
2.1 nm guaranteed (at 1 kV)
1.5 nm guaranteed (at 15 kV and W.D. 12 mm or X-ray analysis position)
Backscattered electron image resolution (optional)
3.0 nm guaranteed (at 15 kV YAG detector, optional)
Cold finger and specimen exchange chamber as standard. Allowing sample exchange via airlock without repositioning
Optional integrated EDX system with 30 degree take-off angle
Fully digital imaging, image processing and archiving system
Dual SE detectors for versatile imaging (SE and BSE)
ExB energy filter
The S-4700 FE-SEM combines the versatility of PC control with a novel electron optical column to give exceptional performance on large and small specimens. Resolution of 1.5nm at 15kV is guaranteed at the EDX and specimen exchange position of 12mm working distance!

The S-4700 also offers excellent low kV performance with guaranteed resolution of 2.1 nm at 1 kV, at a working distance of 1.5mm. Two versions, Type I and Type II, are available, differing in the specimen stage size. The S-4700 Type II features a five axis eucentric motorized stage which will accommodate specimens up to 150 mm in diameter.

Pre-programmed operating modes allow the user to switch from high-resolution conditions to microanalysis conditions at the click of the mouse with no change of objective aperture. The fully integrated new ExB filter opens the door to low voltage, high resolution, backscattered imaging never before possible on a conventional SEM.
Sample tilt of 45 degrees without change in working distance
Convenient and useful beam shift of +/-15um
Electron optics
Electron gun: Cold field emission electron source
Acc. :Voltage 0.5 ;30 kV (variable at 0.1 kV/step)
Probe current:1 pA ; 2 nA (depends on Acc. voltage)
Magnification: x 20 x 500,000
Objective aperture Heated aperture, 4-openings, selectable and alignable outside the vacuum
Specimen Size 2" 4" or 6"
Specimen stage Type I ;Type II

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We provide high quality, used, 2nd hand, rebuilt and refurbished CD-SEM. FESEM, SEM, and FIB.(SEM Image Digitizer System.Schottky Field Emission Filaments for CD-SEM equipment).

SEM:

  • Zeiss/Leo DSM982 FE SEM
  • Hitachi S-4500 - FE SEM, Type I and Type II
  • Hitachi S-4700 - FE SEM, Type II
  • Hitachi S-4800 - FE SEM, Type II
  • Zeiss/Leo 435VP - W SEM, variable pressure JSM-6401F
  • JSM-6330F
  • JSM6300
  • JSM6400
  • SEIKOI SMI 8100
  • SEIKOI SMI 8300
  • Hitachi S-806C

CD/SEM:

FIB:

  • FEI/Micrion M9100 Workstation, Gas box optional
  • FEI/Micrion M9500 Workstation, Gas box optional
  • Seiko 8300 FIB
  • Seiko 8100 FIB

Our equipment is fully reconditioned to meet or exceed OEM specifications and carried out by the qualified engineers with many years of experience working for OEM.


We provide:

-Complete turn key solutions including installation worldwide.
-Modifying and re-engineering equipment to meet specific customer applications.
-Operation, maintenance, and applications training.
-Warranty service for our equipment.

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AccuThermo AW 810
AG Heatpulse 210
AG Heatpulse 410
AG Heatpulse 610
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Gasonics Aura 2000LL
Branson IPC 3000
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Gasonics AE 2001
AutoEtch Lam 490
Lam Rainbow 4520 Oxide Etch
Lam 4428 for Plasma Etch
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HP 4062UX
HP 4145B
EG 1034
EG 2001
EG HORIZON 4085X
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Hitachi FE-SEM model S-4160
Hitachi S-4500
Hitachi S-4700
Hitachi S-8820
Hitachi S-9300
Micrion FIB model M9500
LEO FE-SEM model 982
Other Semiconductor Equipment
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