Hitachi S-8820 CD SEM

ˇ Model: S-8820 or S-8620

ˇ Vintage: 1996

ˇ Wafer Size: 150 mm

ˇ Throughput: 20 wafers per hour 5 pt meas. per wafer continuous

ˇ SECS/GEM Communication Interface

ˇ Schottky Electron Gun

ˇ Single se detector

ˇ Accelerating voltage, 500V to 1300V, 10V steps

ˇ Probe current, 1-16pA at 800V, 1-10pA at 1000V, 1-13pA at 1300V

ˇ 3 Stage Electromagnetic Lens System

ˇ Objective Lens: 4 opening click stop, selectable/adjustable externally

ˇ 2-Stage Deflection Scan Coil

ˇ Astigmatism correction via an 8-pole electromagnetic coil

ˇ SEM Magnification = 1,000x to 150,000x

ˇ Wafer imaging ability: Entire surface of 8” wafer

ˇ Depth of focus: >= 1.0mm at 80,000x magnification

ˇ Resolution: 5 nm at 800V on CRT

ˇ Optical Microscope: Monochrome CCD camera, Fixed Mag of 110x

ˇ Workstation, HP 715-64 computer or later model

ˇ Multipoint Measurement Function

ˇ Edge Roughness Function

ˇ Contact Hole Measurement Function

ˇ Automated Image Archiving Function

ˇ Foreline pump (Rotary) x2

ˇ Turbo pump X2

ˇ Ion Pump x3

ˇ Operating Voltage 100 V AC, 50 Amp.

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We provide high quality, used, 2nd hand, rebuilt and refurbished CD-SEM. FESEM, SEM, and FIB.(SEM Image Digitizer System.Schottky Field Emission Filaments for CD-SEM equipment).

SEM:

• Zeiss/Leo DSM982 FE SEM
• Hitachi S-4500 - FE SEM, Type I and Type II
• Hitachi S-4700 - FE SEM, Type II
• Hitachi S-4800 - FE SEM, Type II
• Zeiss/Leo 435VP - W SEM, variable pressure JSM-6401F
• JSM-6330F
• JSM6300
• JSM6400
• SEIKOI SMI 8100
• SEIKOI SMI 8300
• Hitachi S-806C

CD/SEM:

• Hitachi S-8820 for 5", 6" or 8", Silicon or GaAs wafers
• Hitachi S-8840 for 5", 6" or 8" , Silicon or GaAs wafers
• Hitachi S-9300 for 6", 8" or 12 " Silicon wafers

FIB:

• FEI/Micrion M9100 Workstation, Gas box optional
• FEI/Micrion M9500 Workstation, Gas box optional
• Seiko 8300 FIB
• Seiko 8100 FIB

Our equipment is fully reconditioned to meet or exceed OEM specifications and carried out by the qualified engineers with many years of experience working for OEM.

We provide:

-Complete turn key solutions including installation worldwide.
-Modifying and re-engineering equipment to meet specific customer applications.
-Operation, maintenance, and applications training.
-Warranty service for our equipment.