Refurbished Matrix 10

Manufacturer:Matrix Integrated Systems

Refurbished by:Allwin21 Corp

Matrix is a Registered Trademark of Matrix Integrated Systems, Inc.Matrix 10 provides high throughput in a single wafer system capable of handling wide variety of substrates, including round, square and ranging from 4” up to 8”. By maintaining independent closed-loop system controls, the system optimizes vital device parameters.Fully Refurbished Matrix 10 plasma asher system is for 4 to 8 inch wafer with 3 gas lines with MFCs and one chamber with 8 inch chuck.

Matrix 10 onsists of the following major assemblies:

(1) Main Console:

Process Model,

Wafer Transport Module,

Elevator Module with New Control Board. We have developed a robot control board for the Matrix machines to help in the diagnostics of robot problems. There are LEDs that indicate if the board has received commands and the type of command. It also has LEDs that indicate if a robot limit sensor is active, along with “good” voltage level indicators.

(2) Power Supply Console:

1000W RF Generator,

DC Supply,

AC Distribution

Gas Distribution panel,

Temperature/Pressure Control Module.

We can also provide advanced Equip Robot transfer wafer technology , AW Control Software and Superior Temperature Control Technology to upgrade the refurbished Matrix 10 which provides the following significant advantages.

• New hardware includes: New control Board with cable, new timer counter with watch dog, Pentium Computer with 17” LCD Monitor, standard keyboard and mouse.
• Software calibration and easy to be done.
• More functions and I/O hardware “exposed” for easier maintenance and trouble shooting.
• It is easy to edit recipe with GUI and graph display.
• Save all process data on the computer hard disk.
• A/D and D/A precision is 14 to 16 bits.
• Detect in process and with color curve displayed on the screen.
• Robot teach is on the GUI and easy to do the procedure with new concept teaching method.
• Software watch dog to eliminate machine damage duo to the computer locks up or freeze.
• Sensor status detect function.
• On line help function