Refurbished Matrix 105

Manufacturer:Matrix Integrated Systems

Refurbished by:Allwin21 Corp

Matrix is a Registered Trademark of Matrix Integrated Systems, Inc.Matrix 105 provides high throughput in a single wafer system capable of handling wide variety of substrates, including round, square and ranging from 3” up to 6”. By maintaining independent closed-loop system controls, the system optimizes vital device parameters.

Single Wafer, Multi-Step Processing
Closed-Loop Temperature Control
Pressure Control
Accurate, closed-loop pressure control with “butterfly-style” throttle valve and capacitance manometer
RF power: 100 to 500 watts
Timed cycles up to 4 hour each

Matrix105 Applications

• Photoresist Stripping

  High dose implant (As+, B+, P+)
  Post-polysilicon etch
  Post-metal etch
  Post-oxide etch
  Rework
  Controlled Resist Removal

• Post-develop descum (pre-etch)

  Dry/wet process capability
  Resist planarization
  Uniformity capability (5% 1s)
  GaAs wafer Stripping and Descum
  Thin Film Head Resist Cleaning and Surface Treatment
  MEMS (Micro Electro- Mechanical Systems) Up to 4 hour processes

Matrix 105 consists of the following major assemblies:

• Main Console:
  Process Model,
  Operator interface Model,
  Wafer Transport Module,
  Elevator Module,
  PC Control Module.
• Power Supply Console:
  RF Generator,
  DC Supply,
  AC Distribution,
  Gas Distribution panel,
  Temperature/Pressure Control Module.
• Vacuum Pump (optional): Vacuum Hose and Connector, Ballast Assembly.

We can also provide advanced Equip Robot transfer wafer technology , AW Control Software and Superior Temperature Control Technology to upgrade the refurbished Matrix 105 which provides the following significant advantages.

• New hardware includes: New control Board with cable, new timer counter with watch dog, Pentium Computer with 17” LCD Monitor, standard keyboard and mouse.
• Software calibration and easy to be done.
• More functions and I/O hardware “exposed” for easier maintenance and trouble shooting.
• It is easy to edit recipe with GUI and graph display.
• Save all process data on the computer hard disk.
• A/D and D/A precision is 14 to 16 bits.
• Detect in process and with color curve displayed on the screen.
• Robot teach is on the GUI and easy to do the procedure with new concept teaching method.
• Software watch dog to eliminate machine damage duo to the computer locks up or freeze.
• Sensor status detect function.
• On line help function