PCM Testing Module Design

AW PCM System is designed for semiconductor fab or lab to automatically do:

• PCM (process control module) testing. (PCM TEST SELECT)
• 100% IC die on wafer probing. (IC TEST SELECT)
• Inline instrument testing. (INLINE TEST SELECT)

For PCM testing, there are DC, RF, LCR, C-V (n-d calculated) testing. AW PCM can control auto prober like EG 4085,EG 2001, EG 1034 etc, and characteristic parameter tester like HP4142 (DC), HP4145A (DC), HP4145B (DC), HP4141 (DC), HP4062 (DC with switch matrix, LCR meter), HP4275A (LCR and C-V), HP4280A (C-V), HP4084A (LCR and C-V), HP8772C (RF, Microwave), HP4085M switch matrix, Keithley S280, S350 etc.
For IC 100% die on wafer probing, AW PCM can control auto prober like EG 4085,EG2001, EG1034 etc, and characteristic parameter tester like HP4142, HP 4145B, HP4141, H4062, S350 and H4085 switch matrix.
For inline instrument testing like metrology tools: m-gage or Sonagage, alpha-step, Rudolph elepisometer, Nanospec AFT, wafer thickness meter etc.
It can save auto alignment info for each mask .
The testing data will be automatically real time sent to the server. Some data can be transferred to text file or excel file.

For PCM MAP TEST, there are 3 setups for auto map probing:

• Test ID (Manual Test) Setup
• Map ID setup
• and Auto ID

We can also provide the following e- test used equipment.

ˇTemptronic TP03500
ˇRucker and Kolls Model 260J Probing Station
ˇRefurbished ELECTROGLAS HORIZON 4085X
ˇSIGNATONE S-250 Probe
ˇRefurbished EG 1034
ˇRefurbished EG 2001
ˇRefurbished MP 2020
ˇRefurbished HP 4145B
ˇRefurbished HP 4062
ˇRefurbished HP 4155

ˇAW PCM/IC Software