AG Associates is one of the most famous RTP equipment manufacturers. Many Integrated Chip companies, R&D centers, Institutes all over the world have been using AG Heatpulse Systems.

AG-RTP can provide professionally the following refurbished AG Heatpulse Rapid Thermal Processor with her 20 years experience.

• AG Heatpulse 210
• AG Heatpulse 310
• AG Heatpulse 410
• AG Heatpulse 610
• AG Heatpulse 2100
• AG Heatpulse 4100
• AG Heatpulse 4100S
• AG Heatpulse 4108
• AG Heatpulse 8108

  AG Heatpulse Spare Parts

The AW software incorporates a Superior Temperature Control Technology that surpasses all original manufactures specs. The AW software is capable of controlling the temperature of the wafer to ± 1°C. It is also able to control the temperature from wafer-to-wafer to ± 0.5°C. This is possible with the built-in automated calibration routines and the upgraded 16 bit D/A card. First, the A/D circuits for the temperature feedback devices are calibrated. Then the pyrometer (optional on some systems) is calibrated. In order for the software to understand the thermal capacitance of the system, the chamber is also calibrated. These calibration routines allow the software to understand the complete system, taking into consideration the subtleties of the A/D circuits and the thermal capacitance of heating and cooling of the process chamber.