Used Lam 4428 for Plasma Etch

Manufacturer: LAM Research
Model: Lam 4428
Serial: 3145

Rainbow System Software Version E1; (Yr.2000 Compliant) or Later; Rainbow System Firmware Version G or later.

- SECS Communication Port
- Empak XT200 cassette input
- Endpoint Detection System
405/520nm end point box
- ENI OEM 650A RF Generator
- Upper and lower RF mini-match
- Power sensor,
1.8-32MHz for RF High frequency dip board(PCB)
- Gax-Box 8 process capability
- Ergonomic Cassette Load/Unload
- Hine 38A Indexers
- Upgraded wafer edge sensor, Rev.E
- Loadlock Wafer Sensors
- Flexible 4 pin Lifter
- Adjustable load lock atmosoheric switch
- Special 24V Lockout switch
- RGA test port Extended "1-piece" test port
with manual valve
- Special floor-mounted 4" frame exhaust/6" connection
- Remote AC/DC power box with 24V fans
- Lam Research 2080 or M & W CE Mark Chiller