Matrix 105      Matrix 205      Gasonics Aura 1000      Gasonics Aura 2000LL      Gasoncis Aura 3010      Gasonics L3510      Branson IPC L3200      Branson IPC 3000

 LFE PDS PDE 301      LFE PDS PDE 504      TOK OPMA 1250 Plasma Asher      Genesis Microstar 200C Plasma Asher      Drytek Megastrip 6 H.F.

Branson IPC 3000 Plasma Asher  Equipment

Maker:Branson

Condition:Refurbished and upgraded

Refurbished by:Allwin21 Corp.

The Branson IPC 3000 is a barrel plasma etcher that uses oxygen to etch organic films and residues such as photoresist in a process commonly referred to as "de-scumming." During a normal run for the Branson Barrel Etcher, the chamber is evacuated to under 0.5 torr pressure. A regulated flow of oxygen gas is introduced into the chamber and RF energy is applied to the chamber coils, which creates an oxygen plasma which does the etching. The oxygen ions in the plasma react with organics, such as photoresist, oxidizing or descumming the compounds off of the surface. The oxidized organics are pumped out of the Branson Barrel Etcher's chamber as exhaust gas.

Branson IPC 3000 Features:
POWER RATING : 1000 watts continuous input
REACTOR:1ea 10" dia. x 20" long
OPERATING PRESSURE RANGE:0.1 - 10 torr
VACUUM SEALS : Silicone O rings and bell jar gasket
REACTOR WINDOW: Hinged and spring loaded, with latch for open position
PRESSURE TRANSDUCER: Thermocouple type
IMPEDANCE CONTROL: Matches from 10-1000 watts to present input impedance of 50 ohms at RF power input connector. Automatic impedance matching once preset. 

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We can also provide  AW Control Software and Superior Temperature Control Technology  to upgrade the refurbished Branson tools  which provides the following significant advantages.