Tegal 901e       Tegal 903e       Matrix 303       Matrix 403       Gasonics AE 2001       Lam 490       Lam 590 

      Lam Rainbow 4420       Lam Rainbow 4520       TOK TSE-306W PLASMA ETCHER       Tegal 803 Plasma Etcher
      Tegal 1513e Plasma Etcher       Tel Plasma Etcher 750C

Lam 590 Plasma Etcher  Equipment

Maker:LAM Research

Condition:Refurbished and upgraded

Refurbished by:Allwin21 Corp.

- ENI RF Generator : OEM 12A
- Stepper Arms
- Gas: O2, CHF3, CF4, C2F6, He
- M & W Chiller
- 208V 3 phase 30A power.

 

 

 
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