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Matrix 105 Plasma Asher Descum Equipment

Maker:Matrix

Condition:Refurbished and upgraded

Refurbished by:Allwin21 Corp.

Matrix is a Registered Trademark of Matrix Integrated Systems, Inc.Matrix 105 provides high throughput in a single wafer system capable of  handling wide variety of substrates, including round, square and ranging from 3” up to 6”. By maintaining independent closed-loop system controls, the system optimizes vital device parameters. 

• Single Wafer, Multi-Step Processing
• Closed-Loop Temperature Control
• Pressure Control
• Accurate, closed-loop pressure control with “butterfly-style” throttle valve and capacitance manometer
• RF power: 100 to 500 watts
• Timed cycles up to 4 hour each 

Matrix105 Applications
Photoresist Stripping

• High dose implant (As+, B+, P+)
• Post-polysilicon etch
• Post-metal etch
• Post-oxide etch
• Rework

Controlled Resist Removal

• Post-develop descum (pre-etch)
• Dry/wet process capability
• Resist planarization
• Uniformity capability (5% 1s)

GaAs wafer Stripping and Descum
Thin Film Head Resist Cleaning and Surface Treatment
MEMS (Micro Electro- Mechanical Systems)  Up to 4 hour processes

Matrix 105 consists of the following major assemblies:

• Main Console:

Process Model,
Operator interface Model,
Wafer Transport Module,
Elevator Module,
PC Control Module.

• Power Supply Console:

RF Generator,
DC Supply,
AC Distribution,
Gas Distribution panel,
Temperature/Pressure Control Module.

• Vacuum Pump (optional):

Vacuum Hose and Connector, Ballast Assembly.