Tegal 901e       Tegal 903e       Matrix 303       Matrix 403       Gasonics AE 2001       Lam 490       Lam 590 

      Lam Rainbow 4420       Lam Rainbow 4520       TOK TSE-306W PLASMA ETCHER       Tegal 803 Plasma Etcher
      Tegal 1513e Plasma Etcher       Tel Plasma Etcher 750C

Matrix 403 Plasma Etcher  Equipment

Maker:Matrix

Condition:Refurbished and upgraded

Refurbished by:Allwin21 Corp.

Matrix is a Registered Trademark of Matrix Integrated Systems, Inc.The model 403 is an electro-mechanical production system used to etch materials such as nitride, oxide poly-silicon etc. from the surface of silicon or other substrate. Each wafer is processed individually by means a chemical reaction induced by a gas plasma.

1. Single Wafer, Multi-Step Processing
2. Closed-Loop Temperature Control
3. Pressure Control
4. Accurate, closed-loop pressure control with “butterfly-style” throttle valve and capacitance manometer
5. RF power: 100 to 500 watts
6. Timed cycles up to 4 hour each

Matrix 403 consists of the following major assemblies.
Main Console:
Process Model,
Operator interface Model,
Wafer Transport Module,
Elevator Module,
PC Control Module.
Power Supply Console:
RF Generator,
DC Supply,
AC Distribution,
Gas Distribution panel,
Temperature/Pressure Control Module.
Vacuum Pump (optional):
Vacuum Hose and Connector, Ballast Assembly.

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We can also provide  advanced Equip Robot transfer wafer technology , AW Control Software and Superior Temperature Control Technology  to upgrade the refurbished Matrix303  which provides the following significant advantages.  

                                           

1. New hardware includes: New control Board with cable, new timer counter with watch dog, Pentium Computer with 17” LCD Monitor, standard keyboard and mouse.
2. Software calibration and easy to be done.
3. More functions and I/O hardware “exposed” for easier maintenance and trouble shooting.
4. It is easy to edit recipe with GUI and graph display.
5. Save all process data on the computer hard disk.
6. A/D and D/A precision is 14 to 16 bits.
7. Detect in process and with color curve displayed on the screen.
8. Robot teach is on the GUI and easy to do the procedure with new concept teaching method.
9. Software watch dog to eliminate machine damage duo to the computer locks up or freeze.
10. Sensor status detect function.
11. On line help function
12. Better performance and maintenance than the original systems