Tegal 903e Plasma Etcher Equipment
Maker:Tegal
Condition:Refurbished and upgraded
Refurbished by:Allwin21 Corp.
Tegal 900 series (tegal 901e,Tegal 903e) Plasma/RIE etch System are used by the Semiconductor Industry for integrated circuit fabrication. The system are used in one part of the sequence of manufacturing steps that transfer a pattern formed from a layer of photosensitive material, the photoresist, to a layer that makes up a permanent part of the final device. The process of defining a pattern with photoresist known as photolithography, while the etch process transfers the photoresist pattern to the permanent layer.The 900 Series systems deliver highly reliable, repeatable results in etching a variety of films used to manufacture semiconductor, telecommunications and optoelectronics devices, flat panel displays and thin film magnetic heads.
The Tegal 903e is a versatile diode plasma etch tool designed around a production-proven transport system that can accommodate 75-150 mm round silicon and gallium arsenide (GaAs) substrates. The transport can also be configured to accommodate rectangular substrates from 100-125 mm on a side.
- Single Wafer, Multi-Step Processing
- Closed-Loop Temperature Control
- Pressure Control
- Accurate, closed-loop pressure control with “butterfly-style” throttle valve and capacitance manometer
- New hardware includes: New control Board with cable, new timer counter with watch dog, Pentium Computer with 17” LCD Monitor, standard keyboard and mouse.
- Software calibration and easy to be done.
- More functions and I/O hardware “exposed” for easier maintenance and trouble shooting.
- It is easy to edit recipe with GUI and graph display.
- Save all process data on the computer hard disk.
- A/D and D/A precision is 14 to 16 bits.
- Detect in process and with color curve displayed on the screen.
- Robot teach is on the GUI and easy to do the procedure with new concept teaching method.
- Software watch dog to eliminate machine damage duo to the computer locks up or freeze.
- Sensor status detect function.
- On line help function
- Better performance and maintenance than the original system
Tegal 903e Applications
- GaAs, III-V materials
- pad etch
- passivation etch
- oxide/contact/via etch (down to 0.8 micron)
- LDD spacer etch
- polyimide ILD etch,
- Resist/SOG planarization
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